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摘要：
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快速增长的MEMS市场为微系统工程提供了广阔的发展和应用空间,对微金属零件的需求也日益增多,结合微成形技术和传统塑性加工方法,可以提高微零件精度和生产率,实现批量生产,但是也对微成形技术和塑性加工提出了新要求。尺度效应的影响使得微塑性成形成为一个全新的领域,传统的塑性加工理论无法继续使用。本文在介绍微成形概念的基础上、对其在塑性加工中的应用、进展以及研究方法进行了分析总结,并阐述了相关的关键技术。
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The rapidly developed MEMS market gives the micro-system engineering a wide space for its development and application.The need for metal micro-metal parts is being increased gradually.Combined with micro-forming technology and conventional plastic processing,the micro metal parts can be manufactured at high precision and production rate.However,it asks for the higher requirement on the micro-forming and plastic processing technology.The influence of scale effect makes the micro-forming a new research field,so the conventional plastic processing theory is impractical any more.After introducing the concept of micro-forming,its application,development and research methods in plastic processing are discussed in this paper.Furthermore, the key techniques of the micro-forming are set forth.
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基金项目：
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江苏大学高级人才基金(1281110002)
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作者简介：
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参考文献：
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[1](美)Tai-Ran Hsu著,王晓浩,等译.MEMS和微系统———设计与制造[M].北京:机械工业出版社,2004.
[2]孙友松,章争荣,刘明俊,等.跨入新世纪的塑性加工技术———第七届国际塑性技术大会(7th ICTP)综述[J].锻压技术,2003,28(1):3 5.
[3]Engel U,Eckstein R.Microforming-from basic research to itsrealization[J].Journal of Materials Processing Technology,2002,125 126:35 44.
[4]Geiger M,Kleiner M,Eckstein R,et al.Microforming[C].51st General Assembly of CIRP Nancy,2001:445 462.
[5]Saotome Y,Iwazaki H.Superplastic backward microextrusionof microparts for micro electro mechanical systems[J].Journal of Materials Processing Technology,2001,119(13):307 311.
[6]Saotome Y,Iwazaki H.Superplastic extrusion of microgearshaft of 10μm in module[J].Microsystem Technologies,2000,(6):126 129.
[7]Ike H,Plancak M.Coining process as a means of controllingsurface microgeometry[J].Journal of Materials ProcessingTechnology,1998,80 81:101 107.
[8]Saotome Y,Okamoto T.An in situ incremental microformingsystem for three-dimensional shell strucrures of foil materials[J].Journal of Materials Processing Technology,2001,113(1 3):636 640.
[9]Kim D J,Ku T W,Kang B S.Finite element analysis of micro-roll-ing using grain and grain boundary elements[J].Journal of Mate-rials Processing Technology,2002,130 131:456 461.
[10]王仲仁,苑世剑.塑性加工领域的新进展[J].金属成形工艺,2003,21(5):1 4.
[11]Adranced wagerials processing laboratory.http://www.mech.northwestern.edu/ampl/micro.html,2003.
[12]Bjorkman H,Rangsten P,Hjort K.Diamond microstructuresfor optical micro electromechanical systems[J].Sensors andActuators.1999,78(1):41 47.
[13]Saotomea Y,Imai K,Shioda S,et al.The micro-nanoform-ability of Pt-based metallic glass and the nanoforming of three-dimensional structures[J].Intermetallics,2002,10(1112):1241 1247.
[14]Hee-Won Jeong,Seiichi Hata,Akira Shimokohbe.Microform-ing of Three-Dimensional Microstructures From Thin-Film Me-tallic Glass[J].Journal of micro-electro-mechanical systems,2003,12(1):42 52.
[15]Saotome Y,Miwa Seiji,Zhang Tao,et al.The micro-form-ability of Zr-based amorphous alloys in the supercooled liquidstate and their application to micro-dies[J].Journal of Mate-rials Processing Technology.2001,113(1 3):64 69.
[16]Saotome Y,Itoh K,Zhang T.Superplastic nanoforming of Pd-based amorphous alloy[J].Scripta mater,2001,44(89):1541 1545.
[17]Saotome Y,Hatori T,Zhang T et al.Superplastic micro/nano-formability of La60Al20Ni10Co5Cu5amorphous alloy in su-percooled liquid state[J].Materials Science and Engineering,2001,A304 306:716 720.
[18]Hanada K,Zhang L,Mayuzumi M,et al.Fabrication of dia-mond dies for microforming[J].Diamond and Related Mate-rials,2003,12(3 7):757 761.
[19]杨岳,周兆英,叶雄英.微加工技术[J].半导体技术,1994,12(6):5 10.
[20]Song J F,Rudder,F F.Vorburger T V,et al.Microformcalibrations in surface metrology[J].Internation Journal ofMachine Tools and Manufacture,1995,35(2):301 310.
[21]Kals T A,Eckstein R.Miniaturization in sheet metal working[J].Journal of Materials Processing Technology.2000,103(1):95 101.
[22]张凯锋,王长丽,于彦东.1420Al Li合金超塑特性及微成形[J].金属成形工艺,2003,21(1):11 14.
[23]Terry J.Garino,Alfredo Morales,Thomas Buchheit.Thefabrication of stainless steel parts for MEMS[J].MaterialsResearch Society Symposium Proceeding,2002,687:1 6.
[24]Saotome Y,Yasuda K,Kaga H.Microdeep drawability of ver-y thin sheet steels[J].Journal of Materials Processing Tech-nology.2001,113(1 3):641 647.
[25]申昱,于沪平,阮雪榆.金属微成形技术[J].塑性工程学报,2003,10(6):5 7.
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