锻压技术

SiC的激光表面微造型工艺研究

英文标题：Study on laser surface texturing process of SiC

作者：刘萍萍魏龙谢海银

单位：南京化工职业技术学院流体密封与测控技术研究所江苏省流体密封与测控工程技术研究开发中心南京化工职业技术学院机械技术系

关键词：TG135.5 TG665

分类号：碳化硅；激光表面微造型；端面螺旋槽

出版年,卷(期):页码：2013,38(4):45-49

摘要：

采用灯泵浦YAG-T50系列激光打标机对SiC进行了端面螺旋槽激光微造型加工实验。采用PS50型非接触式三维表面形貌仪测量了槽深和槽内表面粗糙度。通过实验，研究了有效矢量步长、有效矢量步间延时、Q频率、激光电流等工艺参数对微造型加工质量的影响。实验结果表明，当有效矢量步间延时增大或激光电流增大时，螺旋槽深度随之增大；当有效矢量步长增大或Q频率增大时，螺旋槽深度不断减小；而表面粗糙度值则随着有效矢量步间延时、Q频率和激光电流的增大而减小，随着有效矢量步长的增大而增大。从而得出碳化硅的最佳微造型工艺参数为：有效矢量步长0.001mm、有效矢量步间延时60 μs、Q频率20 kHz、激光电流17 A。

The texturing process experiment of SiC surface was done using lamp-pumped YAG-T50 laser marking machine and the depth of groove and the surface roughness were measured using PS50 measurement device which was of non-contact mode. Through experiment, process parameters, such as effective vector step, effective vector step delay, Q frequency, laser current, effecting on the quality of the micro-shape processing were researched. The experimental results show that when effective vector step delay or laser current increases, the depth of the helical groove increases；while effective vector step or the Q frequency increases, the depth decreases; the surface roughness value decreases along with increasing effective vector step delay, Q frequency and laser current increase when the effective vector step increases. For silicon carbide, the best process parameters are that the effective vector step is 0.001mm, effective vector step delay is 60 μs，Q frequency is 20 kHz and laser current is 17 A.

基金项目：

江苏省“六大人才高峰”资助项目（09-D-018，2012-JNHB-017）；江苏省高校科研成果产业化推进项目（JHZD2012-14）

刘萍萍（1979-），女，硕士，副教授

参考文献：

［1］温诗铸，黄平. 摩擦学原理:3版[M]. 北京：清华大学出版社，2008. Wen S Z, Huang P. Friction Theory[M]. 3nd Edition. Beijing:Tsinghua University Press,2008.
［2］Etsion I，Halperin G，Brizmer V，et al. Experimental investigation of laser surface textured parallel thrust bearings
［J］.Tribology Letters，2004，17 ( 2) : 295-300.
［3］Chryssolouris G. Laser Machining: Theory and Practice[M]. New York：Springer-Verlag ,1991.
［4］魏龙，冯秀.化工机械密封实用技术[M]. 北京：化学工业出版社，2011. Wei L, Feng X. Mechanical Seal Practical Technology of Chemical Engineering[M]. Beijing : Chemical Industry Press,2011.
［5］蔡兰，符永宏，叶云霞.激光珩磨技术在气缸表面处理中的应用[J].江苏大学学报，2002,(1):5-8. Cai L, Fu Y H, Ye Y X. The application of laser honing in the treatment of cylinder surface [J]. Journal of Jiangsu University, 2002,(1):5-8.
［6］张发云，闫洪. SiC颗粒对SiCP/AZ61复合材料触变压缩行为的影响[J].锻压技术, 2010, 35(1): 133-137. Zhang F Y，Yan H. Effects of SiC particles on thixotropic compression behavior of SiCp/AZ61 composites[J].Forging & Stamping Technology，2010, 35(1): 133-137.
［7］张华伟.基于流体动压润滑理论的活塞环表面激光微造型技术研究[D].镇江：江苏大学，2009. Zhang H W.Study on the Technology of Piston Rings Surface Laser Micro-texturing Based on Hydrodynamic Lubrication Theory[D].Zhenjiang:Jiangsu University, 2009.
［8］姚旺，张宇民，韩杰才，等.反应烧结碳化硅的磨削特征[J].无机材料学报，2012,27(7):764-768. Yao W,Zhang Y M, Han J C, et al. Grinding Characteristics of reaction bonded silicon carbide[J].Journal of Inorganic Materials, 2012,27(7):764-768.
［9］大族激光工艺培训部. 激光打标技术与应用[M]. 深圳：深圳市大族激光科技股份有限公司，2006. Training Department of AHNS LASER. Laser Marking Technology and Application [M]. Shenzheng : Shenzheng HANS Laser Technology Co.,Ltd.,2006.
［10］李力钧.现代激光加工及其装备[M]. 北京：北京理工大学出版社，1993. Li L J. Modern Laser Processing Equipment and Assembly [M]. Beijing: Beijing Institute of Technology Press, 1993.

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