锻压技术

热轧变形量对半导体用NiCr溅射靶组织和磁性能的影响

英文标题：Influence of hot rolling deformation on microstructure and magnetic properties of NiCr sputtering target for semiconductor

作者：郭美丽

单位：河南工业贸易职业学院信息工程学院

关键词：NiCr溅射靶热轧变形量位错微观组织磁性能

分类号：TG335

出版年,卷(期):页码：2021,46(3):162-166

摘要：

分析了半导体用NiCr溅射靶受到热轧作用后发生的组织与磁性能的变化，研究了不同的NiCr合金显微组织结构对其磁性产生的影响及两者间的相互作用。研究结果表明：在NiCr合金中存在大量FCC晶单相镍基固溶体，逐渐增大热轧变形量后，其形成了宽度更大的衍射峰。当热轧变形量提高后，(100)晶面发生了择优取向，取向度先增大、再降低，其余晶面保持取向度基本不变。在热轧前，NiCr合金基体内未形成位错，对各热轧组织进行BSE表征测试，均表明NiCr合金中形成了更细小的晶粒。在磁滞回线中心区域，经过热轧处理后，形成了更多的磁滞回线封闭区，矫顽力与剩余磁感应强度显著增强。热轧阶段形成了恒定的饱和磁感应强度，提高热轧变形程度后，合金获得了更大的矫顽力。

The changes of microstructure and magnetic properties of NiCr sputtering targets for semiconductor after hot rolling were analyzed, and the influences of different microstructures for NiCr alloys on their magnetic properties and the interaction between them were studied. The results show that there are many FCC single-phase nickel-based solid solutions in NiCr alloy, and the diffraction peaks with larger width are formed after the deformation amount of hot rolling is gradually increased. When the deformation amount of hot rolling increases, the preferred orientation of crystal surface (100) first increases and then decreases, while the orientation of other crystal surfaces remains basically unchanged. Before hot rolling, without dislocation is formed in NiCr alloy matrix, and the BSE characterization test of each hot rolling structure indicates that finer grains are formed in NiCr alloy. In the central region of hysteresis loop, more closed areas of hysteresis loop are formed after hot rolling treatment, and the coercivity and residual magnetic induction intensity are significantly enhanced. Thus, at the hot rolling stage, a constant saturation magnetic induction intensity is formed, and the alloy gains greater coercivity after increasing the deformation degree of hot rolling.

基金项目：

河南省科技厅重大项目(162102310068)

郭美丽（1981-），女，学士，副教授 E-mail：guomeili126@126.com

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