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Abstract：
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With the miniature of the micro parts, there are high requirements for the microforming apparatus. It is difficult for the traditional forming machine to realize the high control precision of load and displacement in small travel. A precision micro forming apparatus has been made using the macro/micro feeding system for the characteristics of microforming process. The piezo actuator is selected as the micro feeding actuator, and a manual screw driven bolt is selected as the macro-feeding device. A measurement system has been designed to measure results of tests and deal with the data immediately, and the high control precision is achieved by a forming process control unit. During the forming test, the whole die device is heated to carry out the isothermal forming process, and the forming temperature is controlled by a PID control unit. The microforming tests have been carried out using the apparatus, and the perfect microgears have been fabricated.
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Funds：
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国家“863”计划MEMS重大专项(2002AA404060和2004AA4042606);;
国家自然科学基金(502750033);;
哈尔滨工业大学跨学科交叉性研究基金(HIT.MD2001.15)资助项目
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AuthorIntro：
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Reference：
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