Transactions of Materials and Heat Treatment

Title：Study on laser surface texturing process of SiC

Authors： LIU Ping-ping WEI Long XIE Hai-yin

Unit： Nanjing College of Chemical Technology Fluid Sealing Measure and Control Engineering Research and Development Center in Jiangsu Province Nanjing College of Chemical Technology

KeyWords： SiC laser surface texturing spiral groove

ClassificationCode：碳化硅；激光表面微造型；端面螺旋槽

year,vol(issue):pagenumber：2013,38(4):45-49

Abstract：

The texturing process experiment of SiC surface was done using lamp-pumped YAG-T50 laser marking machine and the depth of groove and the surface roughness were measured using PS50 measurement device which was of non-contact mode. Through experiment, process parameters, such as effective vector step, effective vector step delay, Q frequency, laser current, effecting on the quality of the micro-shape processing were researched. The experimental results show that when effective vector step delay or laser current increases, the depth of the helical groove increases；while effective vector step or the Q frequency increases, the depth decreases; the surface roughness value decreases along with increasing effective vector step delay, Q frequency and laser current increase when the effective vector step increases. For silicon carbide, the best process parameters are that the effective vector step is 0.001mm, effective vector step delay is 60 μs，Q frequency is 20 kHz and laser current is 17 A.

Funds：

江苏省“六大人才高峰”资助项目（09-D-018，2012-JNHB-017）；江苏省高校科研成果产业化推进项目（JHZD2012-14）

刘萍萍（1979-），女，硕士，副教授

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