Transactions of Materials and Heat Treatment

Title：Influence of hot rolling deformation on microstructure and magnetic properties of NiCr sputtering target for semiconductor

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ClassificationCode：TG335

year,vol(issue):pagenumber：2021,46(3):162-166

Abstract：

The changes of microstructure and magnetic properties of NiCr sputtering targets for semiconductor after hot rolling were analyzed, and the influences of different microstructures for NiCr alloys on their magnetic properties and the interaction between them were studied. The results show that there are many FCC single-phase nickel-based solid solutions in NiCr alloy, and the diffraction peaks with larger width are formed after the deformation amount of hot rolling is gradually increased. When the deformation amount of hot rolling increases, the preferred orientation of crystal surface (100) first increases and then decreases, while the orientation of other crystal surfaces remains basically unchanged. Before hot rolling, without dislocation is formed in NiCr alloy matrix, and the BSE characterization test of each hot rolling structure indicates that finer grains are formed in NiCr alloy. In the central region of hysteresis loop, more closed areas of hysteresis loop are formed after hot rolling treatment, and the coercivity and residual magnetic induction intensity are significantly enhanced. Thus, at the hot rolling stage, a constant saturation magnetic induction intensity is formed, and the alloy gains greater coercivity after increasing the deformation degree of hot rolling.

Funds：

河南省科技厅重大项目(162102310068)

郭美丽（1981-），女，学士，副教授 E-mail：guomeili126@126.com

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